<\/span><\/span><\/span>  <\/span>選<\/span><\/span><\/span><\/span>用高質<\/span><\/span><\/span>量的元件和較少的零件數量使產品可靠性、壽命達到**化，從而使用您的投資和制程能力**的利用。用戶界面友好，操作簡單，上手容易可為您減少人員的培訓成本，提高操作人員的效率。整個電源系統<\/span><\/span>采用超強的 <\/span>ARM<\/span>及 <\/span>FPGA<\/span>邏輯芯片和**的 <\/span>A/D<\/span>轉換芯片去閉環控制射頻輸出功率，使該產品具有極其穩定的功率輸出，減少了由等離子體阻抗變化引起的增益波動，直<\/span>觀快捷簡單的面板操作，有主<\/span>/<\/span>從電源設置，各種問題診斷說明，超大的 <\/span>LCD <\/span>顯示屏提供多種外接用戶端口供客戶選擇，包含 <\/span>RS232<\/span>、<\/span>RS485<\/span>、<\/span>DB<\/span><\/span>25 <\/span>針模擬用戶端口<\/span>,<\/span>與匹配器進行接口通訊控制，直觀的顯示實時匹配電容位置。擁有多種頻段和功率選擇（2M，4M，13.56MHz，27.12MHz，40.68MHz，功率100W到5KW）。<\/span><\/span><\/span><\/span><\/p>

       <\/span>作為射頻驅動等離子體系統的電源，該系統可應用于半導體工業。包括刻蝕、<\/span>RIE<\/span>、平行板 、<\/span>ICP<\/span>、射頻濺射、<\/span>CVD<\/span>、<\/span>PVD<\/span>和<\/span>CO2<\/span>激光器等系統。<\/span><\/span><\/span><\/span><\/p>

具體參數見：//www.yamgd.com/Product/381974422.html<\/a><\/span><\/span><\/p><\/div>