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| 型號:JX213602RSE180干式螺桿真空泵 | 型號:JX213603RSE80干式螺桿真空泵 |
|
抽氣速度(50/60Hz)Pumping Speed(50/60Hz) |
2500/3000 l/min | |
| 150/180 m3/h | ||
| 88/106 CFM | ||
| 極限壓力(Ultimate Pressure) | ≤7.5x10-3 Torr | |
| ≤1.0x10-2 mbar | ||
| ≤1.0 Pa | ||
| 水冷密封馬達(Canned Motor) | 頻率 Frequency | 50/60 Hz |
| 電壓Voltage | 220~440 V | |
| 額定功率Rated Power | 6/4.47 HP/Kw | |
| 連接口(Connection) | 進氣口 Inlet | NW50 |
| 排氣口 Outlet | NW40 | |
| 冷卻水 Cooling Water | 壓力 Pressure | 2.0~4.0 kg/cm2 |
| 流量 Min. Flow | 3L/min 15℃ | |
| 溫度 Temp. | 7L/min 30℃ | |
| 接頭 Connection | RC3/8" | |
| 氮氣 N2 | 壓力 Pressure | 0.15~0.2 Mpa |
| 稀釋流量 Dilute Flow | 0~60 L/min | |
| 密封流量 Sealing Flow | 0~20 L/min | |
| 接頭 Connection | Swagelok 1/4" | |
| 尺寸 Dimension | 長x寬x高 | 920x430x650 mm |
| 重量 Weight | 320 Kg | |
| 噪音 Noise | 70 dB(A) | |
| 控制介面 Control | SEMI E73-0299 | |
| 系統漏率 System Max. Leak-rate | 1.0/10-5 mbar.l/s | |
| 室溫操作范圍 Operation Temp. | 5℃~40℃ | |
| 操作濕度 Operation Moisture | 90%以下 | |
|
抽氣速度(50/60Hz)Pumping Speed(50/60Hz) |
1300/1600 l/min | |
| 80/96 m3/h | ||
| 47/57 CFM | ||
| 極限壓力(Ultimate Pressure) | ≤7.5x10-3 Torr | |
| ≤1.0x10-2 mbar | ||
| ≤1.0 Pa | ||
| 水冷密封馬達(Canned Motor) | 頻率 Frequency | 50/60 Hz |
| 電壓Voltage | 220~440 V | |
| 額定功率Rated Power | 4/2.98 HP/Kw | |
| 連接口(Connection) | 進氣口 Inlet | NW50 |
| 排氣口 Outlet | NW40 | |
| 冷卻水 Cooling Water | 壓力 Pressure | 2.0~4.0 kg/cm2 |
| 流量 Min. Flow | 3L/min 15℃ | |
| 溫度 Temp. | 7L/min 30℃ | |
| 接頭 Connection | RC3/8" | |
| 氮氣 N2 | 壓力 Pressure | 0.15~0.2 Mpa |
| 稀釋流量 Dilute Flow | 0~60 L/min | |
| 密封流量 Sealing Flow | 0~20 L/min | |
| 接頭 Connection | Swagelok 1/4" | |
| 尺寸 Dimension | 長x寬x高 | 814x380x663 mm |
| 重量 Weight | 280 Kg | |
| 噪音 Noise | 68 dB(A) | |
| 控制介面 Control | SEMI E73-0299 | |
| 系統漏率 System Max. Leak-rate | 1.0/10-5 mbar.l/s | |
| 室溫操作范圍 Operation Temp. | 5℃~40℃ | |
| 操作濕度 Operation Moisture | 90%以下 | |
